Например, Бобцов

Analysis of Fabrication Tolerance Based on Uneven Thickness of Su8-photo-resist


In this paper, we have analyzed the relationship between light propagation performance and uneven thickness of Su8-photo-resist based on EOPCB. Although spinning process is used to even the Su8-photo-resist, the obtained Su8-photo-resist is uneven, which directly affect cross-section shape of core layer. As long as we control h e [0,3 mm] and a, b e [0,2 mm], light propagation performance does not affected. But, it is easy to actually fabricate EOPCB.

Ключевые слова:

Статьи в номере